METHOD OF MANUFACTURING FLOW ROOK UNIT

摘要

PROBLEM TO BE SOLVED: To produce a plurality of functional units precisely and efficiently.SOLUTION: A method of producing functional units includes a precursor formation step of forming a substrate precursor including a ceramic precursor provided with a plurality of functional grooves and to-be-divided parts which are arranged at a position between the functional grooves and are more brittle than the parts having the functional grooves, a baking step of baking the substrate precursor to form a functional mother substrate and a division step of dividing the functional mother substrate in the to-be-divided part to form a plurality of functional units.