High reflection film, substrate with high reflection film and method for manufacturing high reflection film

摘要

PROBLEM TO BE SOLVED: To provide; a high reflective film which offers improved adhesion between a silver film and a film formed on a substrate side thereof or a side opposite the substrate side and prevention of sulfurization and migration of the silver film; a substrate having the same; and a manufacturing method for the same.SOLUTION: A high reflective film comprises a sliver film 30 formed on a substrate 10, and a dielectric multilayer film 40 formed on and in contact with the silver film 30. The dielectric multilayer film 40 comprises an inorganic dielectric film(s) 40b having a low refractive index and inorganic dielectric film(s) 40a having a high refractive index alternately laminated to form at least two layers. A layer of the dielectric multilayer film 40 next to the silver film 30 is the inorganic dielectric film 40b having a low refractive index, which is mainly made of SiOand contains ZnO.