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Device and method for increasing infrared absorption in a MEMS bolometer
Device and method for increasing infrared absorption in a MEMS bolometer
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机译:在MEMS辐射热计中增加红外吸收的装置和方法
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摘要
A semiconductor sensor includes a substrate and an absorber. The substrate includes at least one reflective component. The absorber is spaced apart from the at least one reflective component by a distance. The absorber defines a plurality of openings each having a maximum width that is less than or equal to the distance.
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