PROBLEM TO BE SOLVED: To reduce a load in starting a diaphragm type compressor.SOLUTION: The present invention relates to a device and a method for stopping a diaphragm type compressor including a start/stop device. A start/stop method for the diaphragm type compressor including a start/stop device includes: forming a loop circuit (50) from discharge to suction of the diaphragm type compressor by opening a bypass on-off valve (22) simultaneously with closing a discharge on-off valve (21) when a diaphragm type compressor (1) stops an operation; preventing an internal pressure from suction piping to the diaphragm type compressor from becoming negative pressure, by supplying a gas regulated to a little higher pressure than an atmospheric pressure by a pressure regulation valve (24) through suction bypass piping (16) to suction piping (12) while compressing a gas existent in a machine from the suction piping (12) to the diaphram type compressor by the diaphragm type compressor and collecting the gas into a receiver tank by closing a suction on-off valve (23) thereafter; and finally stopping the diaphragm type compressor simultaneously with closing a receiver tank on.off valve (25).SELECTED DRAWING: Figure 1
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