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Pulse light generation method, pulse laser apparatus, exposure apparatus and inspection apparatus including the pulse laser apparatus, and manufacturing method of the electronic device
Pulse light generation method, pulse laser apparatus, exposure apparatus and inspection apparatus including the pulse laser apparatus, and manufacturing method of the electronic device
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机译:脉冲光产生方法,脉冲激光装置,包括该脉冲激光装置的曝光装置和检查装置以及电子设备的制造方法
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摘要
A pulsed light generating method for generating a pulsed light by cutting out a laser light outputted from a laser light source with an intensity modulation type electro optic modulator, wherein: the electro optic modulator is driven by use of a drive signal that changes a voltage applied to the electro optic modulator between a voltage lower than a reference voltage and a voltage higher than the reference voltage, the reference voltage being a voltage applied to the electro optic modulator at which a transmittance of the laser light transmitting through the electro optic modulator is local maximum.
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