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Pulsed light generating method, pulse laser apparatus, exposure apparatus having pulse laser apparatus, and inspection apparatus having pulse laser apparatus
Pulsed light generating method, pulse laser apparatus, exposure apparatus having pulse laser apparatus, and inspection apparatus having pulse laser apparatus
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机译:脉冲光的产生方法,脉冲激光装置,具有脉冲激光装置的曝光装置以及具有脉冲激光装置的检查装置
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摘要
A pulsed light generating method for generating a pulsed light by cutting out a laser light outputted from a laser light source with an intensity modulation type electro optic modulator, wherein: the electro optic modulator is driven by use of a drive signal that changes a voltage applied to the electro optic modulator between a voltage lower than a reference voltage and a voltage higher than the reference voltage, the reference voltage being a voltage applied to the electro optic modulator at which a transmittance of the laser light transmitting through the electro optic modulator is local maximum.
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