Pulse light generation method, pulse laser apparatus, exposure apparatus and inspection apparatus equipped with the pulse laser apparatus

摘要

A method for generating pulsed light is a method for generating pulsed light by cutting a laser beam output from a laser light source with an intensity modulation type electro-optic modulator, and the voltage applied to the electro-optic modulator is set to , A drive signal for changing the voltage applied to the electro-optic modulator when the transmittance of the laser light transmitted through the electro-optic modulator becomes maximum as a reference voltage between a voltage lower than the reference voltage and a high voltage is used And drives the electro-optic modulator to generate pulsed light.