CVD device for silicon-based negative electrode active material, method for manufacturing silicon-based negative electrode active material, method for manufacturing negative electrode for nonaqueous electrolyte secondary battery, and method for manufacturing lithium ion secondary battery

摘要

PROBLEM TO BE SOLVED: To provide a CVD apparatus for silicon based anode active substance materials, capable of inexpensively stably manufacturing a silicon based anode active substance material having an increase in battery capacity, excellent cycle characteristics and stable initial charge/discharge characteristics when used as the anode active material of a lithium ion secondary battery.SOLUTION: The CVD apparatus for silicon based anode active substance materials, for forming a conductive film mainly using carbon on the surfaces of particles consisting of SiO(0.5≤x≤1.6) includes a raw material gas introduction pipe having a raw material gas introduction port for introducing a raw material gas including a carbon source gas into the inside of a furnace core tube. The raw material gas introduction port is positioned inside the furnace core tube. The thermal conductivity of the raw material gas introduction pipe at 700°C is 120 W mKor less, and the thermal conductivity of the raw material gas introduction pipe at 100°C is 165 W mKor less.SELECTED DRAWING: Figure 1