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Iron oxide-based ferromagnetic film and method for producing iron oxide-based ferromagnetic film

机译:氧化铁基铁磁膜及其制造方法

摘要

The present invention is an iron oxide-based ferromagnetic film containing iron oxide formed on an arbitrary substrate, wherein the content ratio of the ε phase in iron oxide is 70% or more, and the crystallite diameter is 2 nm or more and 100 nm or less. Relates to an iron oxide ferromagnetic film. In this magnetic film, a target material formed by sintering iron oxide powder having an ε-phase content of 70% or more is irradiated with laser to ablate the iron oxide powder and deposit it on the substrate at high speed. Can be manufactured. The magnetic film according to the present invention is a magnetic film made of a new ferromagnetic material whose main component is a metal material other than a noble metal.
机译:本发明是在任意的基板上形成有含有氧化铁的氧化铁类强磁性膜,其中,氧化铁中的ε相的含有率为70%以上,且微晶直径为2nm以上且100nm以下。减。与氧化铁铁磁膜有关。在该磁性膜中,用激光照射通过烧结具有ε相含量为70%以上的氧化铁粉末而形成的靶材,以烧蚀该氧化铁粉末并将其高速沉积在基板上。可以制造。根据本发明的磁性膜是由新的铁磁性材料制成的磁性膜,该铁磁性材料的主要成分是贵金属以外的金属材料。

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