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METHOD FOR PRODUCING MULTIPLE OXIDE-BASED SINGLE CRYSTAL FILM, AND MULTIPLE OXIDE-BASED SINGLE CRYSTAL FILM PRODUCED BY THE METHOD
METHOD FOR PRODUCING MULTIPLE OXIDE-BASED SINGLE CRYSTAL FILM, AND MULTIPLE OXIDE-BASED SINGLE CRYSTAL FILM PRODUCED BY THE METHOD
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机译:制备基于多氧化物的单晶膜的方法以及由该方法制备的基于多氧化物的单晶膜
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摘要
PROBLEM TO BE SOLVED: To provide a method of producing a multiple oxide-based single crystal film, by which the single crystal film capable of being used as an electronic device and almost free from defects in the combination of various kinds of substrates and a melt, and to provide the multiple oxide-based single crystal film produced by the method.;SOLUTION: The single crystal film is produced by combining the liquid phase epitaxy action by a single crystal substrate 5, the action caused by control of crystal growth orientation by temperature gradient of a liquid phase-solid phase interface 10 and the action caused by movement of the liquid phase-solid phase interface 10 and control of wettability of the single crystal substrate 5 and the liquid phase.;COPYRIGHT: (C)2002,JPO
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