Mask position adjustment method of ion milling, electron microscope capable of adjusting mask position, mask adjustment device mounted on sample stage, and sample mask part of ion milling device

摘要

Without providing a heat source in the electron microscope, the mask position is adjusted with high accuracy while observing with the electron microscope. A sample mask part (21) capable of adjusting a positional relationship between a sample (3) and a mask (2) in an ion milling mask position adjustment method is positioned on a sample stage of an electron microscope and a mask of a sample mask part (21) The position adjuster (26) is connected to the R axis (113) of the sample stage on the previous stage so that the position of the mask (2) can be adjusted by driving the R axis (113). While observing with the electron microscope, Drive the R axis (113) to adjust the position of the mask (2).