Cylindrical ceramics sputtering target material and cylindrical ceramics sputtering target constructed by joining one or more cylindrical ceramics sputtering target material to a backing tube

摘要

The purpose of the present invention is to suppress the occurrence of arcing, nodules, and cracks that could not be prevented by simply setting various bulk properties (crystal grain size, relative density, conductivity, etc.) individually within a suitable range. It is an object of the present invention to provide a cylindrical ceramics-based sputtering target material and a cylindrical ceramics-based sputtering target obtained by joining the material to a backing tube. In the cylindrical ceramic sputtering target material, in the region divided into four in the axial direction of the target, for each of the four divided regions, 0 °, 90 °, 180 ° and 270 in the circumferential direction in the further divided region. When the regions are divided at intervals of ° and the color difference ΔE * ab is measured in each region, a cylindrical ceramic sputtering target material having a color difference ΔE * ab of less than 1.0 is provided.