Stage apparatus, image projector apparatus having stage apparatus, and imaging apparatus having stage apparatus

摘要

A stage apparatus includes a base member, a movable member which moves relative to the base member, thrust generators which generate thrust forces against the movable member, and a position detector which detects a translation position and a rotational position of the movable member relative to the base member. An interaction of the thrust forces causes the movable member to at least one of: translate, rotate, translate while rotating, and translate after rotating relative to the base member. The position detector includes permanent magnets fixed to one of the movable member and the base member, and pairs of magnetic sensors fixed to the other of the movable member and the base member. The position detector detects the translation position and the rotational position of the movable member relative to the base member based on detection signals input from the pairs of magnetic sensors.