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Method and apparatus for self verification of pressure-based mass flow controllers
Method and apparatus for self verification of pressure-based mass flow controllers
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机译:用于基于压力的质量流量控制器自我验证的方法和设备
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摘要
A mass flow control system can be self verified for its accuracy when controlling a flow to a process. The system comprises: a control valve for controlling the flow of fluid through the system as a function of a control signal; a controller for generating the control signal as a function of measured flow of fluid through the system and a targeted flow set point; a pressure sensor for measuring the controlling fluid pressure for use in measuring and verifying the flow rate; and a source of fluid for providing a known volume of fluid for use in verifying the system accuracy anytime between steps of the flow control process.
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