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Apparatus and method for web-based tool management

机译:用于基于网络的工具管理的设备和方法

摘要

A method is provided, including: establishing a session over the Internet with a client device, the session configured to provide for remote control or monitoring of a manufacturing tool over the Internet via communication with a controller of the manufacturing tool, the manufacturing tool being one of a plurality of manufacturing tools in a fabrication facility (FAB); receiving a request from the client device to access an equipment model defining a representation of the manufacturing tool, the representation of the manufacturing tool; receiving data from a controller of the manufacturing tool that is stored in association with a service object of the manufacturing tool; sending to the client device, via the session, a response to the request, the response including the data received from the manufacturing tool that is stored in association with the service object.
机译:提供一种方法,包括:通过因特网与客户端设备建立会话,该会话被配置为经由与制造工具的控制器的通信来提供对因特网上的制造工具的远程控制或监视。制造工厂(FAB)中的多个制造工具;从客户端设备接收访问访问设备模型的请求,该设备模型定义了制造工具的表示,制造工具的表示;从制造工具的控制器接收与制造工具的服务对象相关联地存储的数据;经由会话将对请求的响应发送到客户端设备,该响应包括从制造工具接收的与服务对象相关联地存储的数据。

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