Compound semiconductor transistor and high-Q passive device single chip integration

摘要

An integrated compound semiconductor circuit including a high-Q passive device may include a compound semiconductor transistor. The integrated compound semiconductor circuitry may also include a high-Q inductor device. The integrated compound semiconductor may further include a back-end-of-line interconnect layer electrically contacting the high-Q inductor device and the compound semiconductor transistor, the back-end-of-line interconnect layer comprising a gold base layer and a copper interconnect layer.