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GaN-BASED BIDIRECTIONAL SWITCH DEVICE

机译:GaN基双向开关器件

摘要

The present invention relates to the field of semiconductor switches, and relates more particularly to a GaN-based bidirectional switch device. The present invention provides a gate-controlled tunneling bidirectional switch device without Ohmic-contact, which avoids a series of negative effects (such as current collapse, incompatibility with traditional CMOS process) caused by the high temperature ohm annealing process. Each insulated gate structure near schottky-contact controls the band structure of the schottky-contact to change the working state of the device, realizing the bidirectional switch's ability of bidirectional conducting and blocking. Due to the only presence of schottky in this invention, no heavy elements such as gold is needed, and this device is compatible with traditional CMOS technology.
机译:GaN双向开关装置技术领域本发明涉及半导体开关领域,尤其涉及GaN基双向开关装置。本发明提供了一种无欧姆接触的栅极控制隧穿双向开关装置,避免了由高温欧姆退火工艺引起的一系列负面影响(如电流崩塌,与传统CMOS工艺不兼容)。肖特基触点附近的每个绝缘栅结构都控制着肖特基触点的能带结构,以改变器件的工作状态,从而实现双向开关的双向传导和阻断能力。由于本发明中仅存在肖特基,因此不需要诸如金的重元素,并且该器件与传统的CMOS技术兼容。

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