DESIGN AND FABRICATION OF PARTIALLY TRANSPARENT PETALED MASK OR OCCULTER USING GRAYSCALE LITHOGRAPHY

摘要

A mask for Poisson spot suppression includes a plurality of petals equally spaced in a circular pattern, the petals comprising a gray scale lithography substrate, the substrate having an opaque center portion and a gradient of increasing transparency extending toward a perimeter of the circular pattern, the gradient effected by a gray scale lithography process.