FABRICATION OF A DEVICE FOR SINGLE-MOLECULE DNA SEQUENCING USING SIDEWALL LITHOGRAPHY

摘要

A nanochannel DNA sequencing device and related methods of fabrication and of DNA sequencing are provided. In one example, a device may include a nanochannel having a width of no greater than about 2 nm and a height no greater than 1.5 times the width. The device may further include a pair of electrodes having a width of no greater than about 10 nm, the electrodes being exposed within the nanochannel to measure electronical characteristics of a DNA strand passing through the nanochannel. In one example, the nanochannel may be formed using lithography techniques, such as sidewall lithography.