SPLITTED PLASMA ANODE FIRE-BALL BASED ION SOURCE FOR BOTH NANOPATTERNING AND THIN FILM DEPOSITION

摘要

The invention relates to an anode fire-ball based splitted ion source comprising of an anode assembly including a plate electrode, a DC power supply and a plurality of water cooled magnets; and a grid housing including a screen grid and an accelerating grid connected with the said power supply and a ceramic separator; wherein the anode fire-ball forms spread over the screen grid and attains the floating potential and wherein the screen grid is not connected with any power supply. At least one sample to be treated located in housing including a sample holder.