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A method and apparatus for the quantitative measurement of the accuracy of surface area

机译:一种定量测量表面积精度的方法和装置

摘要

A method for the quantitative Measurement of the precision parameters of the surface of an area.Understanding: a Flat, Monochromatic Light Wave Guide Towards a predefined surface area; recording an image of the reflected light with a camera and a Lens System that focused onSurface area; deduce The Precision parameters of the surface from the recorded Image; characterized by these parameters of Surface Accuracy of the Determining of the ifFollows: obtained a two-dimensional Spatial Spectrum (Sikh (U,(V) The Geometry of the surface by a Fourier transformation of the recorded Image; adjust the default components of Fourier (Aprilia A2P A3P,,,A4p) in a major Axis Cut along the Axis of maximum elongation Of An elliptical Gaussian Distribution noise (S3) of the two-dimensional Spatial Spectrum (Sikh (U,V); adjust the Fourier Components (A1M, A2M, defaultA3M) in a minor Axis off Axis through the Lesser elongation of the Elliptical Gaussian Distribution noise Spectrum (S3) in the two-dimensional Space (Sikh (U,V); determine the precision parameters of the surface of the surface area from those Fourier components.
机译:一种定量测量区域表面精度参数的方法。了解:朝着预定表面积的平坦单色光波导;用照相机和聚焦在表面区域的镜头系统记录反射光的图像;从记录的图像推导出表面的精度参数;由以下参数的特征确定:ifFollows:获得二维空间光谱(Sikh(U,(V)通过记录图像的Fourier变换获得表面的几何形状;调整Fourier(沿二维空间频谱(Sikh(U,V)的椭圆高斯分布噪声(S3)的最大伸长轴切长轴上的长轴切割的Aprilia A2P A3P ,,, A4p);调整傅立叶分量(A1M,通过二维空间(Sikh(U,V))中椭圆高斯分布噪声谱(S3)的较小伸长率在短轴上偏离轴的A2M,默认值A3M;从以下位置确定表面积的精度参数:那些傅立叶分量。

著录项

  • 公开/公告号ES2664738T3

    专利类型

  • 公开/公告日2018-04-23

    原文格式PDF

  • 申请/专利权人 QSO INTERFEROMETER SYSTEMS AB;

    申请/专利号ES20140751291T

  • 发明设计人 BÅÅTH LARS;

    申请日2014-02-10

  • 分类号G01B11/30;G01N21/956;

  • 国家 ES

  • 入库时间 2022-08-21 12:48:35

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