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INTEGRATED CIRCUIT COMPRISING MULTI/LAZER MICROMECHANICAL STRUCTURES WITH IMPROVED MASS AND RELIABILITY BY USING MODIFIED VIAS AND A METHOD TO OBTAIN THEREOF
INTEGRATED CIRCUIT COMPRISING MULTI/LAZER MICROMECHANICAL STRUCTURES WITH IMPROVED MASS AND RELIABILITY BY USING MODIFIED VIAS AND A METHOD TO OBTAIN THEREOF
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机译:利用改进的视界包含质量和可靠性得到改善的多层/多层微机械结构的集成电路及其获得方法
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摘要
An integrated circuit and the method to produce the integrated circuit comprising: a substrate (10); active devices (11); plurality of metal layers (17), wherein said metal layers are separated by dielectric layers (13) and connected to each other by plurality of vias (19); at least one micromechanical region (15) wherein some of the dielectric layers are removed leaving hollow spaces (23), thereby some of said metal and via layers form a micromechanical device in said micromechanical region, wherein said micromechanical device comprises at least one multi-layer structure (165) that is built of a plurality of metal layers and at least one via layer and said multi-layer structure is characterised by that at least two metal layers of said multi-layer structure are joined by at least one modified via (41).
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