首页> 外国专利> METHOD FOR MANUFACTURING CAPACITOR, METHOD FOR MANUFACTURING SUBSTRATE WITH BUILT-IN CAPACITOR, SUBSTRATE WITH BUILT-IN CAPACITOR, AND SEMICONDUCTOR DEVICE MOUNTING COMPONENT

METHOD FOR MANUFACTURING CAPACITOR, METHOD FOR MANUFACTURING SUBSTRATE WITH BUILT-IN CAPACITOR, SUBSTRATE WITH BUILT-IN CAPACITOR, AND SEMICONDUCTOR DEVICE MOUNTING COMPONENT

机译:制造电容器的方法,利用内置电容器制造基板的方法,利用内置电容器制造基板的基板以及半导体装置安装部件

摘要

Provided are: a step (1) for forming a first electrode 3A; a step (2) for forming a high dielectric thin film 5 on the first electrode 3A; a step (3) in which a solder-containing resin composition 6 that contains a resin component and a melting temperature transition-type solder is provided on the high dielectric thin film 5, degassing is performed, and the resin is filled into pinholes in the high dielectric thin film 5; a step (4) in which the melting temperature transition-type solder 6 is allowed to settle and a melting temperature transition-type solder layer 7 is formed on the high dielectric thin film 5; a step (5) for melting the melting temperature transition-type solder layer 7, and prompting the formation of an alloy to yield a conductor layer 8 for which the re-melting temperature is MP; a step (6) in which the resin component is hardened at a temperature lower than the melting temperature MP of the conductor layer 8 to make a resin hardened layer 9; and a step (7) for forming a through hole in the resin hardened layer 9 and exposing the conductor layer, and also forming a second electrode connected to the conductor layer.
机译:提供:形成第一电极3A的步骤(1);步骤(2),用于在第一电极3A上形成高介电薄膜5。步骤(3),其中在高介电薄膜5上提供包含树脂成分和熔融温度转变型焊料的含焊料树脂组合物6,进行脱气,并且将树脂填充到树脂中的针孔中。高介电薄膜5;步骤(4),使熔化温度过渡型焊料6沉降,并在高介电薄膜5上形成熔化温度过渡型焊料层7。步骤(5),用于熔化熔化温度过渡型焊料层7,并促使形成合金,以产生再熔化温度为MP的导体层8;步骤(6),其中,在比导体层8的熔融温度MP低的温度下使树脂成分固化而制成树脂固化层9。步骤(7),用于在树脂硬化层9中形成通孔并露出导体层,并且还形成与导体层连接的第二电极。

著录项

  • 公开/公告号WO2018038094A1

    专利类型

  • 公开/公告日2018-03-01

    原文格式PDF

  • 申请/专利权人 MIURA SHIGENOBU;

    申请/专利号WO2017JP29906

  • 发明设计人 MIURA SHIGENOBU;

    申请日2017-08-22

  • 分类号H05K1/16;H01G4/12;H01L23/12;H05K3/46;

  • 国家 WO

  • 入库时间 2022-08-21 12:45:28

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