SEMI-INSULATING CRYSTALS, n-TYPE SEMICONDUCTOR CRYSTALS, AND p-TYPE SEMICONDUCTOR CRYSTALS

摘要

Provided are semi-insulating crystals represented by the compositional formula In_xAl_yGa_1-x-yN (where 0 ≤ x ≤ 1, 0 ≤ y ≤ 1, 0 ≤ x + y ≤ 1), wherein: the concentration of each of Si, B, and Fe in the crystals is less than 1 x 10¹⁵ at/cm³; and the electrical resistivity under temperature conditions of 20-200°C is 1 x 10⁶Ωcm or higher.