COATING PROCESS METHOD, COMPUTER STORAGE MEDIUM, AND COATING PROCESS DEVICE

摘要

A method for coating a coating liquid onto a substrate is provided, wherein said method comprises: supplying, before a liquid film of coating liquid formed on the substrate becomes dried, a solvent for the coating liquid to a peripheral portion of the liquid film of the coating liquid on the substrate while the substrate is rotated at a predetermined rotational speed, thereby forming a mixed layer of the coating liquid and the solvent in the peripheral portion; and, thereafter, rotating the substrate at a rotational speed higher than the predetermined rotational speed to move the mixed layer toward the periphery, thereby controlling the film thickness of the coating liquid after drying.