Coating processing device, coating processing method and computer storage medium

摘要

A coating processing apparatus for applying a coating liquid containing an optical material to a substrate, comprising: a holding portion for holding a substrate, a coating nozzle for discharging the coating liquid to a substrate held in the holding portion, the holding portion and the coating It has a moving mechanism for relatively moving the nozzle in an orthogonal direction, and a liquid receiving portion which is provided on both sides of the outside of the substrate held in the holding portion and receives the coating liquid discharged from the coating nozzle.