A method and a system (200) for monitoring a laser scribing process used for forming isolation trenches (21, 22, 23) in a solar module are described. The method comprises the steps of providing a semi-finished solar module (10), forming an isolation trench (21, 22, 23), illuminating a region (4) of the semi-finished solar module (10) at a first surface (101) of the semi-finished solar module (10), detecting an amount of light transmitted through the illuminated region (4) of the semi-finished solar module at a second surface (102) of the semi-finished solar module (10) and evaluating the formed isolation trench (21, 22, 23) in the illuminated region (4). The system (200) comprises a device for producing a laser beam (300), a device for illuminating a region of the semi-finished solar module (400), a device for detecting an amount of light (500), and a device for evaluating the formed isolation trench (600). The method and the system (200) provide a simple, fast and effective way for continuous inspecting isolation trenches (21, 22, 23).
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