ROBOTIC IMAGING SYSTEM BASED ON VIRTUAL REALITY TECHNOLOGY

摘要

A robotic imaging system based on virtual reality technology. A cover ring a (2), a cover ring b (3), and a cover ring c (4) are sleeved in sequence on a photomask barrel (5) by means of screws, and a top sealing ring (1) is fixed to the cover ring a (2) by means of a bolt rod; a circle of external silicon steel blocks (23) are arranged in the outer barrel constituted by the cover ring a (2), the cover ring b (3), and the cover ring c (4) together, and every two external silicon steel blocks (23) are fixedly connected by means of a shaft pin (24); the external silicon steel blocks (23) and internal silicon steel blocks (21) are connected to each other by means of connecting members (22); the external silicon steel blocks (23) is fixed to the cover ring b (3) by means of pins (20); the internal silicon steel blocks (21) are connected to the bottoms of the external silicon steel blocks (23) by means of block pins (25).