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DEVICE FOR PRETREATING SURFACE AND INTERFACIAL SAMPLE OF THIN FILM MATERIAL
DEVICE FOR PRETREATING SURFACE AND INTERFACIAL SAMPLE OF THIN FILM MATERIAL
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机译:用于处理薄膜材料的表面和界面样品的装置
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摘要
The present invention relates to a device for pretreating a surface and interfacial sample of a thin film material. The device comprises: a user interface unit for obtaining physical property information and slicing thickness information of a sample; a sample holder unit for fixing and coupling the sample, and formed to be able to perform first direction reciprocation; a blade selecting unit including a plurality of blades for generating a sample having a thickness shown by the slicing thickness information by slicing the sample, and selecting one specific blade from the blades in accordance with a blade selection signal; a blade holder unit for fixing and coupling the specific blade, and formed to be able to perform second direction reciprocation; a motor unit including a first driving motor for moving the sample holder unit in accordance with a first motor control signal, and including a second driving motor for moving the blade holder unit in accordance with a second motor control signal; and a control unit for generating the blade selecting information, the first motor control signal, and the second motor control signal corresponding to the obtained slicing thickness information or the obtained physical property information, controlling an operation of the blade selecting unit to select the one specific blade in accordance with the generated blade selecting information, controlling the motor unit to be operated in accordance with the generated first motor control signal and the second motor control signal, and controlling the generation of a sample having a thickness shown by the obtained slicing thickness information from the sample by the mutual movement of the sample holder unit and the blade holder unit.;COPYRIGHT KIPO 2017
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