A MICROELECTROMECHANICAL DEVICE AN ARRAY OF MICROELECTROMECHANICAL DEVICES A METHOD OF MANUFACTURING A MICROELECTROMECHANICAL DEVICE AND A METHOD OF OPERATING A MICROELECTROMECHANICAL DEVICE

摘要

Aspects of a microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device, are discussed herein. The microelectromechanical device may comprise: a substrate; a diaphragm mechanically coupled to the substrate, the diaphragm including a stressed region to buckle the diaphragm into one of two geometrically stable positions; an actuator mechanically coupled to the diaphragm, and the actuator including a piezoelectric layer over the diaphragm; and a controller configured to provide an electrical control signal in response to a digital sound input, wherein the actuator is configured to receive the electrical control signal to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create sound waves.