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Swellable Film Forming Composition and Method of Nanoimprint Lithography Using It
Swellable Film Forming Composition and Method of Nanoimprint Lithography Using It
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机译:溶胀性成膜组合物及其纳米压印光刻方法
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摘要
Which can be cast and cured on a substrate to form a micro-replicated pattern, and further, swell upon exposure to water to release from the substrate. A water swellable acrylic polymer formed from such compositions, and methods of using it in nanoimprint lithography, are also disclosed.
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