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ASH-FREE CYCLIC ORGANIC POLYOL REACTIVE POROGENS USING THE ASH-FREE CYCLIC ORGANIC POLYOL AND NANOPOROUS ULTRA LOW DIELECTRIC FILM BY USING THE SAME
ASH-FREE CYCLIC ORGANIC POLYOL REACTIVE POROGENS USING THE ASH-FREE CYCLIC ORGANIC POLYOL AND NANOPOROUS ULTRA LOW DIELECTRIC FILM BY USING THE SAME
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机译:通过使用相同的无灰循环有机多元醇和纳米超低介电薄膜来形成无灰循环有机多元活性氧
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摘要
The present disclosure relates to a reactive porogen using cyclic organic polyol and an ultra low dielectric film prepared using the same, and more particularly, to novel cyclic organic polyol as a cyclic organic polyol compound which can be completely pyrolyzed at a temperature of 500° C. or less, does not leave carbon residue during a heat treatment if an end hydroxyl group of the cyclic organic compound is substituted by a functional group of alkylalkoxysilane and then used as a reactive porogen, and is involved in a sol-gel reaction of organic silicate and suppresses phase separation and thus forms pores having a uniform size and has excellent mechanical properties as compared with a porosity, a reactive porogen using the ash-free cyclic organic polyol, and an ultra low dielectric film prepared using the same.
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