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WLP WAFER LEVEL PACKAGE WLP AND METHOD FOR FORMING THE SAME

机译:WLP晶圆级包装WLP及其形成方法

摘要

A semiconductor device structure and a method of forming the same are provided. The semiconductor device structure includes a substrate, and a conductive pad formed on the substrate. The semiconductor device structure includes a protective layer formed over the conductive pad, and a post-passivation interconnect (PPI) structure formed at least in the protective layer. The PPI structure is electrically connected to the conductive pad. The semiconductor device structure also includes a first moisture resistant layer formed over the protective layer, wherein the protective layer and the first moisture resistant layer are made of different materials. The semiconductor device structure further includes an under bump metal (UBM) layer formed over the first moisture resistant layer and connected to the PPI structure.
机译:提供了一种半导体器件结构及其形成方法。半导体器件结构包括基板以及形成在基板上的导电焊盘。半导体器件结构包括:形成在导电焊盘上方的保护层;以及至少形成在保护层中的钝化后互连(PPI)结构。 PPI结构电连接到导电垫。半导体器件结构还包括形成在保护层上方的第一防潮层,其中,保护层和第一防潮层由不同的材料制成。半导体器件结构还包括形成在第一防潮层上方并连接到PPI结构的凸块下金属(UBM)层。

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