LED Apparatus of exposure for scan type using LED light source having cooling parts and optical partition wall

摘要

A scan type exposure apparatus using a LED light source including a cooling unit and an optical partition wall for preventing deformation of a component and preventing a decrease in luminous efficiency of the LED light source and for making the distribution of luminous intensity emitted by the LED light source constant. The apparatus includes an optical module array in which a plurality of optical module units each including a plurality of LED light sources mounted on a printed circuit board and an optical partition wall in which each of the plurality of LED light sources is located at the center and the LED light sources are arranged in a staggered arrangement, Cooling cooling unit for cooling the LED light source and the printed circuit board in contact with the printed circuit board and a first flow path communicating with the outside of the optical module array and connected to the space d of the optical module units and air- .