SCAN-TYPE EXPOSURE APPARATUS USING UV LED CAPABLE OF IMPLEMENTING A LOW COST HIGH YIELD EXPOSURE SYSTEM WITH EVEN BEAM PROJECTION AND SEMI-PERMANENT LIFETIME IN COMPARISON WITH MERCURY LAMP OF UV LED LIGHT SOURCE

摘要

PURPOSE: Scan-type exposure apparatus is provided to minimize the size of an exposure substrate without size limit to exposure substrate by using a scan module to scan the upper stage.;CONSTITUTION: Scan-type exposure apparatus using UV LED contains ultra-violet light emitting diode (UV LED) light source (110), an optical system (120), a scan module (100) with an optical system (120) projecting scan beam (130), a stage (200) supporting the substrate (211) which receives the scan beam from the scan module to make exposure, a substrate chuck (210) putting and fixing the substrate on the stage, and a mask chuck (220) putting the mask (221) on the substrate.;COPYRIGHT KIPO 2013