MOSFET Super junction MOSFETMetal Oxide Semiconductor Field Effect Transistor and method of the super junction MOSFET

摘要

A super-junction MOSFET comprises: a substrate of a first conductivity type; an epitaxial layer of the first conductivity type positioned on the substrate; pillars of a second conductivity type vertically extended on the epitaxial layer and separated at regular intervals; a first well of the second conductivity type connected to upper ends of the pillars in the epitaxial layer, and extended to an upper surface of the epitaxial layer; second wells of the first conductivity type positioned within the first well; and a plurality of gate structures which are positioned on the epitaxial layer, have a stripe shape extended in one direction, and are separated from each other. Therefore, areas of the gate structures are relatively small to reduce input capacitance of the super-junction MOSFET.