MOSFET Super junction MOSFETMetal Oxide Semiconductor Field Effect Transistor and method of the super junction MOSFET

摘要

The super-junction MOSFET includes a substrate of a first conductivity type, an epitaxial layer of a first conductivity type positioned on the substrate, and a filler of a second conductivity type that extends vertically to the epitaxial layer and is spaced apart from each other by a predetermined interval. And, a first well of a second conductivity type, each connected to an upper end of the pillars in the epitaxial layer and extending to an upper surface of the epitaxial layer, and a second well of a first conductivity type positioned in the first well Wells and a plurality of gate structures disposed on the epitaxial layer and having a stripe shape extending in one direction and spaced apart from each other are included. Accordingly, since the areas of the gate structures are relatively small, the input capacitance of the super junction MOSFET can be reduced.