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METHOD FOR MANUFACTURING BLOCKCOPOLYMER MULTI-LAYERED THIN FILM AND THE BLOCKCOPOLYMER MULTI-LAYERED THIN FILM MANUFACTURING BY THE METHOD
METHOD FOR MANUFACTURING BLOCKCOPOLYMER MULTI-LAYERED THIN FILM AND THE BLOCKCOPOLYMER MULTI-LAYERED THIN FILM MANUFACTURING BY THE METHOD
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机译:制备嵌段共聚物多层薄膜的方法和采用该方法制备嵌段共聚物多层薄膜的方法
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摘要
The present invention relates to a method for producing a block copolymer multilayer thin film, and a block copolymer multilayer thin film produced therefrom, ensuring excellent productivity since nanometer-scale regular vertical alignment of block copolymers can be conducted via simple processes without undergoing complicated pretreatment processes. At the same time, the thickness of thin films is less limited, it is possible to produce thicker thin films and multilayer thin films.
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