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METHOD FOR MANUFACTURING BLOCKCOPOLYMER MULTI-LAYERED THIN FILM AND THE BLOCKCOPOLYMER MULTI-LAYERED THIN FILM MANUFACTURING BY THE METHOD
METHOD FOR MANUFACTURING BLOCKCOPOLYMER MULTI-LAYERED THIN FILM AND THE BLOCKCOPOLYMER MULTI-LAYERED THIN FILM MANUFACTURING BY THE METHOD
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机译:制备嵌段共聚物多层薄膜的方法和采用该方法制备嵌段共聚物多层薄膜的方法
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摘要
The process for preparing the block copolymer multilayer thin film of the present invention and the block copolymer multilayer thin film prepared therefrom can induce regular vertical alignment of the nanometer size of the block copolymer by a simple process without complicated pretreatment process, Excellent. At the same time, since the limitation of the thickness of the thin film is low, a thicker thin film and a multilayer thin film can be manufactured.
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