Apparatus for transporting a substrate, apparatus for vacuum processing a substrate, and method for maintenance of a magnetic levitation system

摘要

An apparatus 100 for transporting a substrate 10 is provided. Apparatus 100 includes a vacuum chamber 110 having a chamber wall configured to separate vacuum side 101 from atmospheric side 102 and a vacuum chamber 110 configured for noncontacting of substrate carrier 140 within vacuum chamber 110. [ And a flotation system 120. The magnetic levitation system 120 includes at least one magnetic device 122 configured to provide a magnetic force F acting on the substrate carrier 140 during transport of the substrate carrier 140 in the vacuum chamber 110 along the transport path ) And at least one holding unit (130) configured to hold at least one magnetic device (122) accessible from the atmospheric side (102).