Method for controlling the temperature of an object held by a clamp of a lithographic apparatus, a clamp for holding an object of the lithographic apparatus, and a clamp of the lithographic apparatus

摘要

The lithographic apparatus includes a clamp (406) configured to receive an object (402). The clamp forms at least one channel (408) configured to pass fluid at a first fluid temperature. The lithographic apparatus also includes a chuck 404 coupled to the clamp. The chuck 404 forms at least one void 464 configured to thermally isolate the chuck from the clamp.