CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS

摘要

A lithographic apparatus includes a clamp configured to receive an object. The clamp defines at least one channel configured to pass a fluid at a first fluid temperature. The lithographic apparatus also includes a chuck coupled to the clamp. The chuck defines at least one void configured to thermally insulate the chuck from the clamp.