DIELECTRIC MATERIAL HAVING SUPERLATTICE STRUCTURE, ELECTRONIC DEVICE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

摘要

According to an embodiment of the present invention, provided is a dielectric material having a superlattice structure in which a unit dielectric layer, where three or more ferroelectric materials having different dielectric constants are stacked in an atomic unit, is repeatedly laminated. According to another embodiment of the present invention, provided is an electronic device including a substrate, and a dielectric layer formed on the substrate and having a unit dielectric layer in which three or more ferroelectric materials having different dielectric constants are stacked in an atomic unit. According to another embodiment of the present invention, provided is a method for manufacturing the electronic device. An objective of the present invention is to provide a dielectric material which has a superlattice structure and can be utilized as a multi-electrostatic capacity material by changing the size of the dielectric permittivity depending on the electric field application direction, an electronic device, and a method of manufacturing the electronic device.;COPYRIGHT KIPO 2018