DIELECTRIC MATERIAL HAVING SUPERLATTICE STRUCTURE, ELECTRONIC ELEMENT, AND METHOD FOR MANUFACTURING ELECTRONIC ELEMENT

摘要

An embodiment of the present invention provides a dielectric material having a superlattice structure, which is obtained by repeatedly laminating a unit dielectric layer in which three or more ferroelectric materials having different dielectric constants are stacked on an atomic scale. Another embodiment of the present invention provides an electronic element comprising: a substrate; and a dielectric layer disposed on the substrate, the dielectric layer being obtained by repeatedly laminating a unit dielectric layer in which three or more ferroelectric materials having different dielectric constants are stacked on an atomic scale. Another embodiment of the present invention provides a method for manufacturing the electronic element.