Polymer material for self-organization, self-organizing film, manufacturing method of self-organizing film, pattern and pattern forming method

摘要

A self-organizing film, a method of manufacturing a self-organizing film, and a method of forming a pattern and a pattern, which can reduce defects based on defective portions in a micro-phase separation and can form fine and minute patterns . The self-organizing polymeric material of the present invention is a triblock copolymer or a triblock copolymer obtained by linking a first polymer block containing a structural unit having a specific structure and a second polymer block containing a structural unit having a specific structure, /RTI ;