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ETCHANT ADDITIVES AND ETCHANT USING THE SAME
ETCHANT ADDITIVES AND ETCHANT USING THE SAME
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机译:附魔添加剂和使用相同的附魔
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摘要
The present invention relates to an etching additive for controlling an etching speed for controlling a direction of etching, an etchant including the same, and a manufacturing method of a wire using the same. When using the etching additive of the present invention, the speed and direction of etching of vertical and horizontal directions can be controlled in etching process for circuit formation such that linearity between a bottom portion and a top portion of the circuit can be secured, close to 1 to 1 ratio from the bottom portion to the top portion, and an etching factor which has a high etching factor of the circuit close to infinity can be realized.
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