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1 MEMS gyroscope with 1 DOF drive-mode

机译:1个具有1个自由度驱动模式的MEMS陀螺仪

摘要

The present invention relates to a micro electro mechanical systems (MEMS) gyroscope including: a sensor mass composed of two mass units excited by one degree of freedom (DOF) in the first axial direction as an excitation direction in an excitation mode, and arranged axisymmetrically about a second axis and excited in the opposite directions; a frame connected to the sensor mass; and a first sensing electrode for sensing the displacement of at least one of the frame or the sensor mass by one DOF, wherein the two mass units vibrate in the opposite directions about the second axis due to Coriolis force caused by inputting an external angular velocity about the second axis, and have a first sensing mode for sensing the vibration of at least one of the frame or the sensor mass by one DOF. In addition, the two mass units further have a second sensing mode for sensing the vibration of an inner mass included in the sensor mass due to Coriolis force caused by an external angular velocity about a third axis, and further have a third sensing mode for sensing the vibration of a central mass due to Coriolis force caused by an external angular velocity about the first axis.
机译:微机电系统陀螺仪技术领域本发明涉及一种微机电系统陀螺仪,该微机电系统陀螺仪包括:传感器质量,该传感器质量由两个质量单元构成,该两个质量单元在激励模式下沿第一轴向作为激励方向在一个自由度(DOF)下被激励。绕第二轴并沿相反方向激励;连接到传感器块的框架;第一感测电极,用于感测至少一个框架或传感器质量块通过一个自由度的位移,其中,两个质量块由于输入外部角速度而产生的科里奥利力,绕着第二轴线在相反方向上振动。第二轴具有第一感测模式,该第一感测模式用于通过一个自由度来感测框架或传感器质量中至少一个的振动。另外,两个质量单元还具有第二感测模式,该第二感测模式用于感测由于绕第三轴线的外部角速度引起的科里奥利力引起的传感器质量中包括的内部质量的振动,并且还具有用于感测的第三感测模式。由于围绕第一轴的外部角速度引起的科里奥利力引起的中心质量的振动。

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