首页> 外国专利> 1 MEMS gyroscope with 1 DOF drive-mode

1 MEMS gyroscope with 1 DOF drive-mode

机译:1个具有1个自由度驱动模式的MEMS陀螺仪

摘要

The present invention relates to a MEMS gyroscope, and more particularly, to a MEMS gyroscope comprising two mass unit units excited in mutually opposite directions arranged in a line-symmetrical manner about a second axis, Sensor mass; A frame connected to the sensor mass; And a first sensing electrode for sensing a displacement of at least one of the frame or the sensor mass at one degree of freedom, wherein the two mass body units are arranged so that a Coriolis force caused by inputting an external angular velocity about the second axis And a first sensing mode for sensing a vibration of at least one of the frame or the sensor mass by one degree of freedom by vibrating in opposite directions about the second axis. And a second sensing mode for sensing the vibration of the inner mass included in the sensor mass due to a Coriolis force caused by an external angular velocity around the third axis, And a third sensing mode for sensing the vibration of the center mass due to the Coriolis force caused by the angular velocity.
机译:MEMS陀螺仪技术领域本发明涉及一种MEMS陀螺仪,更具体地,涉及一种MEMS陀螺仪,其包括沿彼此相反的方向激励的两个质量单位单元,该两个质量单位单元围绕第二轴线传感器质量线对称地布置。框架连接到传感器块;以及第一感测电极,其以一个自由度感测框架或传感器质量中的至少一个的位移,其中,两个质量体单元布置成使得通过输入围绕第二轴线的外部角速度而引起的科里奥利力并且第一感测模式用于通过绕第二轴线在相反方向上振动而以一个自由度感测框架或传感器质量中的至少一个的振动。第二感测模式,用于感测由于绕第三轴的外角速度引起的科里奥利力而引起的传感器质量中的内部质量的振动,第三感测模式,用于感测由于第三轴线引起的中心质量的振动角速度引起的科里奥利力。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号