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THERMAL BASE GENERATOR THERMOSETTING RESIN COMPOSITION CURED FILM CURED FILM MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
THERMAL BASE GENERATOR THERMOSETTING RESIN COMPOSITION CURED FILM CURED FILM MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
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机译:热基发生器热固树脂组成固化膜固化膜的制造方法和半导体器件。
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摘要
A thermosetting resin composition, a cured film, a method for producing a cured film, and a semiconductor device capable of cycling a thermosetting resin at a low temperature and preparing a thermosetting resin composition excellent in stability. The thermal base generator includes at least one selected from an acidic compound which generates a base when heated to 40 DEG C or higher and an ammonium salt having an anionic and ammonium cation having a pKa1 of 0 to 4. The acidic compound is preferably an ammonium salt and / or a compound represented by the following general formula (1). A 1 represents an organic group of p, R 1 represents a monovalent organic group, L 1 represents an (m + 1) -valent organic group, m represents an integer of 1 or more, and p represents an integer of 1 or more.
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