- PROCESS CHAMBER LID DESIGN WITH BUILT-IN PLASMA SOURCE FOR SHORT LIFETIME SPECIES

摘要

the implementation of this example is to increase the material in good order on the device and method, and more specifically, the plasma - enhanced process, material to the kind of the card. in the coating chamber. it is one of the, or the additional board into the processing chamber in order to supply.chamber body, the processing volume of the chamber body, the process of volume in a layout or the additional support to the board. the board support body, the support body arranged on the board, the plasma to the ubc1cuc0dduc2dc then the process volume. one or the additional radical species in the area to provide the plasma cavity so that the assembly process.the gas distribution assembly for coupling the rf (radio frequency) power source, the process of the assembly and the coupling of the plasma of the gas source, and the process of the assembly and coupling of reaction gas source contains.